| 摘要 |
The clamping pin (30) is dimensioned such that a gap exists between flat bottom (41) of workpiece carrier (40) and surface (5,6) of chuck (1) prior to activation of clamping mechanism after inserting pin in chuck opening. The pin and area around opening (2) of the chuck is elastically deformed upon activation of clamping mechanism to pull pin into the opening and advance carrier towards to chuck surface. <??>The pulling action applied to the pin and the chuck, which serves as a Z-direction stopper, until flat bottom surface of carrier rests on surface portion of the chuck.
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