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发明名称
Filmforming polymers
摘要
申请公布号
EP0952166(B1)
申请公布日期
2003.06.25
申请号
EP19990107109
申请日期
1999.04.12
申请人
INFINEON TECHNOLOGIES AG
发明人
HIEN, STEFAN DR.;SEBALD, MICHAEL DR.
分类号
G03F7/033;C08F222/16;C08F230/04;C08F230/08;C08F232/04;C08F232/08;G03F7/075;(IPC1-7):C08F222/16;G03F7/039;C08F222/20
主分类号
G03F7/033
代理机构
代理人
主权项
地址
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