METHOD FOR DETECTING DEFECT

摘要

PURPOSE: A method is provided to be capable of accurately detecting the defect of each portion of analysis object material by designating a defect critical curve as the reference of defect determination according to the distribution of measured signals corresponding to reference signals. CONSTITUTION: Reference signals and measured signals according to the reference signals of patterns formed in analysis object material, are continuously obtained by using gray level(S10). The continuously obtained reference and measured signals are displayed on an X-Y plane(S12). A signal concentrated region is designated on the X-Y plane(S14). A defect critical curve is designated near to the signal concentrated region(S16). The defect of each portion of the analysis object material is detected by using the defect critical curve as a reference(S18).