发明名称 METHOD FOR MANUFACTURING IMAGE SENSOR
摘要 PURPOSE: A method for manufacturing an image sensor is provided to be capable of improving photo sensitivity. CONSTITUTION: Stacked gate electrodes are formed on a semiconductor substrate(20) having a photodiode(PD), and a sensing diffusion region(26) is formed in the substrate(20) formed between the stacked gate electrodes. An insulating layer(27) is formed on the entire surface of the resultant structure. A plug(28) is formed to contact simultaneously the gate electrode and the sensing diffusion region(26) through the insulating layer(27). A spacer(25) is formed at both sidewalls of the gate electrode, thereby preventing the gate electrode from connecting the plug(28).
申请公布号 KR20030049165(A) 申请公布日期 2003.06.25
申请号 KR20010079304 申请日期 2001.12.14
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HUH, EUN MI
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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