| 摘要 |
PURPOSE: A magnetic actuating micro mirror, a method for manufacturing the same and an optical switch by utilizing the same are provided to implement an optical switch as a major element of an optical communication optical signal router module by manufacturing and utilizing the micro mirror and the micro mirror array since the micro mirror and the micro mirror array are actuated by an electrostatic actuator. CONSTITUTION: A magnetic actuating micro mirror includes an actuating portion(200) provided with an actuating coil(302) integrated on one side of at least one neighboring edges and a separated or an integrated type pedestal, a mirror portion provided with a mirror(107) having a thin film magnet(105) placed on the opposite side of the actuating portion. The actuating portion attaches the mirror portion to the both side of the actuating portion in a separated or in an integrated so as to support the mirror(107).
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