发明名称 |
Two-dimensional beam deflector |
摘要 |
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.
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申请公布号 |
USRE38153(E1) |
申请公布日期 |
2003.06.24 |
申请号 |
US20000557938 |
申请日期 |
2000.04.24 |
申请人 |
NOVA MEASURING INSTRUMENTS, LTD. |
发明人 |
FINAROV MOSHE |
分类号 |
G01B11/06;G03F7/20;(IPC1-7):G01B11/06;G02B26/08 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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