发明名称 |
METHOD FOR PRODUCING HIGH-PURITY SOLUTIONS USING GASEOUS HYDROGEN FLUORIDE. |
摘要 |
<p>The invention relates to a method for producing a high-purity solution that contains hydrogen fluoride or a salt thereof or a mixture of two or more thereof. The inventive method comprises the following step (i): hydrogen fluoride is passed into at least one anhydrous solvant. The method is characterised in that hydrogen fluoride is passed into the at least one anhydrous solvant as a gas or liquid gas or as a mixture of gas and liquid gas.</p> |
申请公布号 |
MXPA01009861(A) |
申请公布日期 |
2003.06.24 |
申请号 |
MX2001PA09861 |
申请日期 |
2000.03.29 |
申请人 |
HONEYWELL SPECIALTY CHEMICALS SEELZE GMBH |
发明人 |
SIEVERT, WOLFGANG |
分类号 |
C01B7/01;C01B7/09;C01B7/19;C09K13/08;H01L21/306;H01L21/311 |
主分类号 |
C01B7/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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