发明名称 Method and apparatus for the manufacture of circuits for a large display device using stitch exposure
摘要 A method and apparatus for the manufacture of circuits for a large display device using stitch exposure. In the peripheral region of a circuit pattern on a mask, the method of stitch exposing provides for a joining of pairs of stitch regions in order to join in an interfitting state such that a smaller mask can be combined to form a larger display device. By causing the corresponding positional relationship of mask and plate to change in a direction in which a pair of stitch regions face each other, the arrangement of respectively formed pattern counterparts, after being placed in a mutually complementary interfitting relationship, are transferred so as to be joined to the respective stitch region of a circuit pattern region periphery already transferred onto the plate.
申请公布号 US6583854(B1) 申请公布日期 2003.06.24
申请号 US20000722608 申请日期 2000.11.28
申请人 NIKON CORPORATION 发明人 HAZAMA JUNJI;KIUCHI TOHRU
分类号 G03F7/22;G03F7/20;H01L21/027;(IPC1-7):G03B27/42 主分类号 G03F7/22
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