| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold (stamper) for forming a pattern having fine width and height on the surface of a resin. SOLUTION: A metal is laminated on a substrate plate having a resist pattern formed on its surface to form a metal layer which is, in turn, peeled from the substrate plate having the resist pattern formed thereto to manufacture the mold for molding a resin. In this manufacturing method, the resist pattern is formed by forming a pattern on a resist film, which is obtained using a chemical amplifying type resist composition containing a resin and an acid generating agent, by an electron beam. COPYRIGHT: (C)2003,JPO |
