| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional positioning device having long life and capable of facilitating maintenance and inspection. SOLUTION: The two-dimensional positioning device is formed by an article support table 21, a first frame 22a provided adjacent to the outside of one opposite side of the table, a first direct action rod 24a fixed at one end to the frame 22, a first rod direct action driving mechanism 27a connected to the other end of the direct action rod, a second frame 22b provided adjacent to the outside of the other opposite side of the table, a second direct action rod 24b fixed at one end to the second frame, a second rod direct action driving mechanism 27b connected to the other end of the second direct action rod, and a Langevin type vibrator 30 fixed on the base through a strut 28, and formed by bolting a piezoelectric vibrator 33 sandwiched between an upper metal member 34a and a lower metal member 34b. COPYRIGHT: (C)2003,JPO
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