Projection optical system, production method thereof, and projection exposure apparatus using it

摘要

In a projection optical system having at least two silica glass optical members, a birefringence value is measured at each of points in a plane normal to the optical axis with the center at an intersection of each optical member with the optical axis, a distribution of signed birefringence values in each optical member is obtained by assigning a positive sign to each birefringence value when a direction of the fast axis thereof is a radial direction to the intersection with the optical axis and assigning a negative sign to each birefringence value when the direction of the fast axis thereof is normal to the radial direction, and the optical members are combined with each other so as to satisfy such a placement condition that a signed birefringence characteristic value of the entire projection optical system calculated based on the distributions of signed birefringence values is between -0.5 and +0.5 nm/cm both inclusive. This permits minimization of influence from nonuniform distribution of birefringence values in the optical members on the imaging performance of the projection optical system or on the resolution of projection exposure apparatus and in turn enables provision of the projection optical system with high imaging performance, a production method thereof, and the projection exposure apparatus capable of achieving high resolution.