| 摘要 |
PROBLEM TO BE SOLVED: To provide a synthetic quartz glass ingot as a material of a highly homogeneous synthetic quartz glass member for for an excimer laser, particularly an ArF excimer laser, as an optical member with resistance against laser light, as an optical member used together with a light source such as an excimer laser, and as an optical fiber for UV rays. SOLUTION: The synthetic quartz glass ingot is manufactured by gas phase hydrolysis or oxidation decomposition from the silica source compound by oxyhydrogen flames. The striae observed in the direction perpendicular to the growing direction of the depositing and fusing planes of silica fine particles are periodically distributed along the growing direction of the silica. COPYRIGHT: (C)2003,JPO
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