Extended life source arc chamber liners

摘要

A liner (102) for an arc chamber (100) of an ion implanter. The arc chamber (100) comprises a liner (102) on the inner surface (104) of the arc chamber (100) that extends the life of the arc chamber (100). The liner (102) comprises a one piece portion (102a) that covers the bottom and long sidewalls of the arc chamber (100) and two end plates (102b) for covering the end walls of the arc chamber (100). When the liner (102) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber (100).