Load-control-type actuator

摘要

A load-control type actuator is provided, in which the impact load applied to a workpiece is reduced enabling damages in the workpiece to be small. A load-control-type actuator includes a nozzle which comes into contact with a workpiece, a nozzle holder for supporting the nozzle via a spring, and a voice-coil motor which can control a thrust driving force to the nozzle holder. The spring constant of the spring is set so that the spring reaction force of the spring within the response time of the voice-coil motor is reduced smaller than the maximum impact load when the nozzle touches the workpiece. The nozzle is suspended and supported by the spring and the initial load thereof is set to zero.