BAR COATING METHOD AND BAR COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To suppress the generation of stepwise irregularity in the surface of a coating film at the time of coating of the dispersed particle-containing layer of an antireflection film. SOLUTION: A wire bar 11 is supported by a backup member 12 and the support parts 12a and 12b are projected on both sides of the backup member 12 to support both ends of the wire bar 11. The support parts 12a and 12b are provided outside the width W1 of a product. The shearing generated in a coating solution is suppressed between the backup member 12 and the wire bar 11 to eliminate the generation of stepwise irregularity in the surface of the coating film. COPYRIGHT: (C)2003,JPO