Microdevice fabrication method using regular arrays of lines and spaces

摘要

A method of fabricating a microdevice having the steps of forming a first regular array of lines and spaces from a first layer of material deposited on a substrate; patterning the first regular array of lines and spaces to form a first portion of a microdevice component; providing an intermediate layer over the first portion of the microdevice component; forming a second regular array of lines and spaces from a second layer of material deposited on the intermediate layer; patterning the second regular array of lines and spaces to form a second portion of the microdevice component; and forming contact holes in the intermediate layer to establish conductivity between the first portion of the microdevice component and the second portion of the microdevice component.