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申请公布号
JP3419208(B2)
申请公布日期
2003.06.23
申请号
JP19960194438
申请日期
1996.07.24
申请人
发明人
分类号
C30B9/06;C30B29/40;H01L21/208;(IPC1-7):C30B29/40
主分类号
C30B9/06
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