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发明名称
摘要
申请公布号
JP3419143(B2)
申请公布日期
2003.06.23
申请号
JP19950110393
申请日期
1995.05.09
申请人
发明人
分类号
H01L27/088;H01L21/8234;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823;H01L21/823
主分类号
H01L27/088
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