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发明名称
摘要
申请公布号
JP3418611(B2)
申请公布日期
2003.06.23
申请号
JP20000376904
申请日期
2000.12.12
申请人
发明人
分类号
G01L9/04;B81C1/00;G01L9/00;G01L9/12;H01L21/02;H01L21/20;H01L21/306;H01L29/84;(IPC1-7):H01L29/84
主分类号
G01L9/04
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代理人
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