REFLECTIVE ILLUMINATING OPTICAL ELEMENT, REFLECTIVE ILLUMINATING OPTICAL SYSTEM, AND DUV TO EUV EXPOSURE DEVICE,申请号AU20020354418-传众专利搜索

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发明名称	REFLECTIVE ILLUMINATING OPTICAL ELEMENT, REFLECTIVE ILLUMINATING OPTICAL SYSTEM, AND DUV TO EUV EXPOSURE DEVICE
摘要
申请公布号	AU2002354418(A1)	申请公布日期	2003.06.23
申请号	AU20020354418	申请日期	2002.12.05
申请人	NIKON CORPORATION	发明人	TOMOWAKI TAKAHASHI;KIYOSHI MITARAI
分类号	G03F7/20;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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