发明名称 CHEMICAL REACTOR TEMPLATES: SACRIFICIAL LAYER FABRICATION AND TEMPLATE USE
摘要 The invention relates to chemical reactor templates having channel-like voids parallel to the template's major axis. The channel-like voids may have either micro-scale or nano-scale cross sectional areas. The chemical reactor templates may be used to produce micro- and nano-scale filaments and particles which have a variety of uses. In some embodiments a chemical reactor template of the invention have at least two intersecting channel-like voids substantially parallel to the major axis of said template. The invention also relates to methods for manufacturing a chemical reactor template using sacrificial layers. The chemical reactor templates of the invention may be fabricated to have multiple arrays of channel-like structures as well as vertical elements to provide access to act as contacts for the channel-like voids and materials formed within the template. The invention relates to methods for producing filaments and particles using a chemical reactor template. The filaments or particles are formed within the channel-like void to produce a filament within the channel-like void and may be extruded from the chemical reactor template. Using the chemical reactor templates one can fabricate a wide variety of devices having at least one contact region between a first and second material system over a substrate. Another aspect of the invention is the filaments made using a chemical reactor template of the invention. Accordingly the invention relates to an oriented filament has a nano- or micro-scale cross-sectional area and is prepared within a channel having a nano- or micro-scale cross-section.
申请公布号 AU2002364157(A1) 申请公布日期 2003.06.23
申请号 AU20020364157 申请日期 2002.12.12
申请人 THE PENNSYLVANIA STATE UNIVERSITY 发明人 CHIH-YI PENG;SEN AYUSMAN;SEONG, H. KIM;HENRY, C. FOLEY;BIN GU;WOOK, JUN NAM;KYUHWAN CHANG;STEPHEN, J. FONASH
分类号 B01J8/00;B01J19/00;B05D5/12;B81B1/00;B81B3/00;C01B31/02;C23C16/01;C23C16/04;C23C16/44;C30B7/00;D01D5/00;D01F9/21;H01L21/00;H01L21/335;H01L21/768;H01L51/00;H01L51/30 主分类号 B01J8/00
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