| 摘要 |
PROBLEM TO BE SOLVED: To provide a disk chuck which can clamp many disks while their centers are aligned with one another and unclamp them at the same time. SOLUTION: The disk chuck is equipped with a hollow main shaft 10 which has a plurality of disks 100 stacked on its external surface, a piston 20 which is provided in a free elevation state in the main shaft 10, and a clamping shaft 30 having a disk depression part 32 which is arranged in the hollow part of the main shaft 10 and extends to outside the main shaft 10 so that the disks 100 on the external surface of the main shaft 10 are clamped and unclamped while the main shaft is coupled with the piston 20 and vertically moved. COPYRIGHT: (C)2003,JPO
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