SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processor in which the throughput is not subjected to rate-control by the carrying time of a substrate. SOLUTION: The substrate processing section 3 of a substrate processor 1 is provided with a mechanism 30 for carrying a substrate 90 between processing units. The carrying mechanism 30 is provided with arms 300 for carrying in/out the substrates 90 while holding by the same number as the processing units arranged around the carrying mechanism 30 in the order of processing the substrates 90. Upon completion of processing at all processing units, the carrying mechanism 30 advances respective arms 300 simultaneously toward respective processing units and eventually retracts them after all substrates 90 are picked up and held. Thereafter, the carrying mechanism 30 turns by a specified angle to advance respective arms 300 again simultaneously toward respective processing units thus mounting the holding substrates 90 on the next processing units. COPYRIGHT: (C)2003,JPO