MICROLENS ARRAY AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a microlens array having a high condensing effect. SOLUTION: The method for manufacturing a microlens array having a plurality of microlenses arranged in two-dimensional directions includes the following processes. A film of a photosensitive material having thermally deforming property is formed to uniform film thickness on a flat transparent film and patterned into a form independent and separated in each region of forming the microlens. The patterned photosensitive material is heated to form convex microlenses. The surface where the microlenses are arranged is subjected to dry etching to remove the flat part in the gap between the microlenses so as to obtain the microlens array having no flat part in the gap between the microlenses. COPYRIGHT: (C)2003,JPO