| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric device wherein miniaturization and high density arrangement of thermoelectric elements are enabled, n-type and p-type thermoelectric elements are arranged perpendicularly to each other and wiring resistance is low, an optical module using the device and a manufacturing method thereof. SOLUTION: A large number of fine holes are formed in a regular arrangement on both surfaces of base material by using photolithography and etching and filled with thermoelectric material. The n-type thermoelectric elements 51 and the p-type thermoelectric elements 52 are manufactured by sintering the thermoelectric material. At least the four n-type thermoelectric elements 51 which are arranged vertically and at least four p-type thermoelectric elements 52 which are arranged laterally are arranged perpendicularly to each other on an XY plane, size of all the thermoelectric elements 51, 52 in X and Y directions is at most 250μm, four thermoelectric elements which are most adjacent to the n-type thermoelectric elements 51 are p-type, and four thermoelectric elements which are most adjacent to the p-type thermoelectric elements 52 are n-type. The thermoelectric elements 51, 52 are bonded on a rectangular electrode 53 or a rectangular electrode 53 whose corners are rounded on a substrate 54, via metal bonding material. COPYRIGHT: (C)2003,JPO |
