| 摘要 |
The microscope uses thermo-reflectance to measure the temperature of an integrated circuit (1), point by point with a resolution corresponding to the component size. Ultraviolet light is directed on to the integrated circuit, and the reflectance is detected and measured. The circuit is covered with a special layer, such that results represent the temperature of integrated circuit components.- The microscope uses thermo-reflectance to measure the temperature of an integrated circuit (1). The circuit is covered by a passivation layer (2). A light source (3) emits light within a given wavelength range ( lambda 1, lambda 2), and an optical focussing system (10) ensure the optical conjugation of the source and the detector (6) with the measured circuit. The passivation layer (2) is sufficiently opaque in the spectral region used ( lambda 1, lambda 2), so that its measured temperature represents that of the components which it covers. The spectral region ( lambda 1, lambda 2) is preferably in the ultraviolet region. The passivation layer may contain silicon nitride (Si3N4), and the source and detector operate within a spectral region lying between 150nm and 300nm.
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