Triangular-section conductive metallic track formation in microelectronics technology, e.g. production of photovoltaic cells, involves forming metallic tracks on resin tracks obtained by lithography

摘要

Production of triangular-section conductive metallic tracks involves: depositing a resin layer (21) on a semiconductive substrate (22); lithography of the resin layer, forming trapezoidal metallic tracks having a predetermined slope; wet-etching to form the tip of the metallic tracks; and removing the resin layer. Preferred Features: The metallic tracks can be formed by dry etching, or by electrolytic deposition of metal into 'molds' formed in the resin layer. An Independent claim is given for utilization of the invention in the manufacture of concentration photovoltaic cells.