发明名称 OPTICAL SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an optical semiconductor device that inhibits the collector voltage dependency of the collector current of a transistor while achieving a structure for reducing the capacity and increasing the speed of a photodiode, and at the same time can inhibit the increase in the saturation voltage of the transistor in the transistor and the photodiode formed on the same substrate, and the provide a manufacturing method of the optical semiconductor device. SOLUTION: In the optical semiconductor device, a photodiode PD and an NPN transistor TR are formed on the same semiconductor substrate. The photodiode PD has a high-concentration P-type layer PDP, an I-type PDI, and a high-concentration N-type layer PDN. The NPN transistor TR comprises a P-type base region B having a high-concentration P-type region B1 physically connected to the high concentration P-type PDP of the photodiode PD as its one region, and an N-type emitter region E that is formed in an N-type collector region and the P-type base region B with the high-concentration N-type region C1 physically connected to the high-concentration N-type layer of the photodiode PD as the partial region. The N-type collector region C has an N-type well region CW reaching the P-type base region B from the high- concentration N-type region C1. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003174188(A) 申请公布日期 2003.06.20
申请号 JP20010373150 申请日期 2001.12.06
申请人 HAMAMATSU PHOTONICS KK 发明人 SAWARA MASAAKI;SUZUKI TAKASHI;INOUE HITOSHI
分类号 H01L27/14;H01L31/10;(IPC1-7):H01L31/10 主分类号 H01L27/14
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