| 摘要 |
PROBLEM TO BE SOLVED: To provide a bearing support mechanism for a molecular pump capable of preventing an over-heating of a ball bearing pivotally supporting a rotation shaft and stably operating it without vibrating the rotation shaft in a molecular pump. SOLUTION: In the molecular pump, the rotation shaft 2 of the molecular pump is pivotally supported by a first ball bearing 4 and a second ball bearing 5. Two pairs of ball bearings 4, 5 are formed so as to support axial thrust separately directed to each other, i.e., an upward direction or a downward direction of the rotation shaft 2. Further, the first ball bearing 4 is fitted into a round hole 8a of a bearing sleeve 8 having a flange part 8b butted to an end surface of an outer ring of the ball bearing 4 through an O ring. The bearing sleeve 8 is fitted into a round hole 9a of a sleeve case 9 with a slight diameter gap with an outer periphery part of the bearing sleeve 8 without interposing an O ring. The ball bearing 4 is axially pressed by a resilient force of a disc spring-like spring interposed between the bearing sleeve 8 and the sleeve case 9 through the bearing sleeve 8. COPYRIGHT: (C)2003,JPO
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