INSPECTION STAGE AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inspection stage and an inspection device prevented from damaging an inspection object such as a glass mask plate at the work of putting on or taking up.

SOLUTION: The inspection stage 30 in the inspection device is provided with a loading plate 31 for loading the inspection object such as the glass mask plate 91. A plurality of upper and lower rollers 34 are assembled to respective shafts 343a and 343b on both sides of the loading plate 31. As the shaft 343a or 343b provided with the upper and lower rollers is rotated, the top end with the roller goes up and down. The shaft 343a or 343b is rotated, as an operator rotates a control lever 33a or 33b. The operator operates the control lever 33a or 33b, and puts on or takes up the inspection object such as the glass mask plate 91 when the upper and lower rollers are at the upper position.

COPYRIGHT: (C)2003,JPO