| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generating device in which generation of heat at the X-ray take-out aperture can be suppressed, while preventing radiation of the electron beam to an object. SOLUTION: When the electron beams 26 generated in the electron beam generating device 21 enter the X-ray target 23 of the X-ray take-out aperture 22, X-ray 27 is generated resulting from the suppressed radiation that is generated at that time. This X-ray 27 passes through the ventilation trunk 25 where cooling air 29 flows and transmits the electron beam shielding plate 24, and is radiated on the object 28. A part of the electron beams 26 that enter the X-ray target 23 transmits the X-ray target 23, but such electron beam 26a is stopped by the electron beam shielding plate 24. at that time, the cooling air 29 flows in the cooling ventilation trunk 25 provided between the X-ray target 23 and the electron beam shielding plate 24, and the X-ray target 23 and the electron beam shielding plate 24 are cooled. COPYRIGHT: (C)2003,JPO
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