| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump driving device capable of outstandingly reducing the maximum power consumption amount fed to a motor and a heater in the turbo-molecular pump. SOLUTION: When a supply power calculation means 13 receiving a power monitor signal from a power monitor means 15 determines that a rotation speed of the motor 2 of the turbo-molecular pump 1 is during acceleration, it outputs that a supply power to the heater 5 is reduced from the amount of the power supplied at present by a power corresponding to the power supplied to the motor 2 to a heater control means 14 and controls the amount of the power so that a total amount of the power both motor 2 and heater 5 does not exceed a previously determined upper limit. By this control, since the maximum amount of power can be outstandingly reduced as compared with a conventional power source device 6 for driving the turbo-molecular pump in which the power of the motor 2 and the heater 5 is independently controlled, it can contribute to an outstanding cost decrease of a power source facility and a running cost of the turbo-molecular pump 1 can be reduced. COPYRIGHT: (C)2003,JPO
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