发明名称 HOLDER
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a holder which can suck a work depending on the shape or size thereof. <P>SOLUTION: A suction port 1 and a suction pump 3 are coupled through a suction passage 10 being opened/closed through movement of a cylinder 2 and a negative pressure chamber 50 for moving the cylinder 2 is coupled between a work detection port 4 and a pump 5 for movement. When the work W is placed on the work detection port 4, the negative pressure chamber 50 is evacuated to bring abut a negative pressure. Consequently, only the cylinders 2c and 2d mounting no work W move to close the suction passage 10 thus stopping suction from the suction openings 1c and 1d. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003174078(A) 申请公布日期 2003.06.20
申请号 JP20010370790 申请日期 2001.12.05
申请人 ADTEC ENGINEENG CO LTD 发明人 HARA TAKAYUKI
分类号 H01L21/683;H01L21/027;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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