| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gasket 1 used for a wafer carrier having an improved sealability. <P>SOLUTION: The gasket 1 is fitted to a lid member 3 of the wafer carrier 2 to seal a space between the lid member 3 and a box member 5, and comprises a first seal part 7 attachably/detachably abutted on the box member 5, and second seal parts 8 and 9 to prevent stuff to be sealed from entering a fitting groove 4 of the lid member 3. A lip type seal which is attachably/detachably and tightly fitted to the box member 5 is preferable for the first seal part 7, and the lip type seal which is elastically and tightly fitted to the lid member 3 on both sides of the fitting groove 4 is preferable. <P>COPYRIGHT: (C)2003,JPO</p> |
