摘要 |
PROBLEM TO BE SOLVED: To increase gain and improve oscillation efficiency by making an optical axis of an optical resonator pass a subsonic region and a supersonic region. SOLUTION: Laser gas is discharged and excited in the subsonic region 5 by an electrode 90, and reaches sonic velocity in a throat part 4 which is the narrowest part of a supersonic nozzle part 1. The laser gas is accelerated to supersonic in a widened part which is downstream side from the throat part 4 in the supersonic nozzle part 1. Velocity of the laser gas which becomes supersonic is maintained at supersonic in a supersonic part 2 and reduced effectively in a diffuser part 3 and becomes subsonic. Velocity of the laser gas is reduced further in the diffuser part 3, cooled in a heat exchanger 59, and after that, sent to a pump 58. A laser beam is led out by using a stabilized optical resonator which is so constituted of an output mirror 21, a total reflection mirror 31 and a turning-back mirror 32 that the optical axis of the optical resonator passes the subsonic region and the supersonic region. COPYRIGHT: (C)2003,JPO |