METHOD FOR MATERIAL SURFACE TREATMENT AND ITS APPEARANCE IMPROVEMENT USING LASER BEAM

摘要

FIELD: material science; manufacture of semiconductor devices. SUBSTANCE: material surface is treated under modulated Q- factor conditions by irradiating surface with laser beam focused in line whose length l is commensurable with surface height and scanning this surface at beam oscillation frequency not over 100 Hz chosen from equation , where Q is total energy density of laser beam acting on material surface; sigma is surface cohesion force. Proposed method provides for surface treatment without subjecting it to heat or changing surface morphology. EFFECT: reduced amount (concentration) of fused areas on surface. 1 cl, 1 dwg