MANUFACTURING METHOD FOR MAGNETOOPTIC DISK BY INDUCTIVELY COUPLED RF PLASMA SUPPORTED MAGNETRON SPUTTERING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a magnetooptic disk which can form a magnetooptic recording film of small particle size enough for good magnetic field sensitivity and high-density recording by using an inductively coupled RF plasma supported magnetron sputtering device. SOLUTION: The inductively coupled RF plasma supported magnetron sputtering device which has a magnetic circuit 10 provided on the reverse surface of at least one cathode electrode 9, a target 12 mounted on the top surface of each cathode electrode 9, and a helical coil 14 provided so as to surround the space between the target 12 and a substrate 7 and can superposes RF electric power on the coil 14 is used to form the magnetooptic recording film on the substrate 7. COPYRIGHT: (C)2003,JPO