| 摘要 |
PROBLEM TO BE SOLVED: To realize a high resolution alignment without burdening load to a flexible substrate. SOLUTION: The alignment device comprises a substrate holder 3 holding a flexible substrate 1 with a magnetic film 2 formed thereon, and an electromagnet fixing the flexible substrate 1 with the magnetic film stuck thereon to the substrate holder 3. The alignment method comprises a process of fixing the substrate 1 with the magnetic layer 2 formed thereon to the substrate holder 3 by the magnetic force generated from the electromagnet, and setting the position of the mask 4 to the flexible substrate 1 in the above state, a process of forming a pattern using the mask 4, and a process of separating the flexible substrate 1 from the substrate holder 3 by turning-off the electromagnet. COPYRIGHT: (C)2003,JPO
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