| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film thermistor the characteristics of which are little deteriorated and the resistance of which is little fluctuated by the irradiation heat of laser light. SOLUTION: This thin film thermistor 10 is provided with an insulating substrate 11, an insulating coating film 13 formed on one main surface of the substrate 11, and a pair of comb-shaped electrodes 14a and 15a which are formed to face each other on the coating film 13. This thermistor 10 is also provided with lead-out electrodes 14 and 15 respectively joined to the electrodes 14a and 15a, a resistance value adjusting metallic pattern 16 extended from at least one of the electrodes 14 and 15, and cut sections 16a, 16b, and 16c for trimming the metallic pattern 16. In addition, this thermistor 10 is also provided with heat-sensitive films 17A and 17B formed to partially cover the cut sections 16a, 16b and 16c and to entirely cover the comb-shaped electrodes 14a and 15a and a protective film 18 covering the films 17A and 17B. COPYRIGHT: (C)2003,JPO
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