发明名称 |
Silicon based substrate with a CTE compatible layer on the substrate |
摘要 |
An article comprising a substrate containing silicon and at least one layer which contains a coefficient of thermal expansion (CTE) tailoring additive in an amount sufficient to maintain a compatible CTE with at least one adjacent layer and the substrate.
|
申请公布号 |
US2003113553(A1) |
申请公布日期 |
2003.06.19 |
申请号 |
US20010034677 |
申请日期 |
2001.12.19 |
申请人 |
SUN ELLEN Y.;EATON HARRY E. |
发明人 |
SUN ELLEN Y.;EATON HARRY E. |
分类号 |
B32B15/01;B32B18/00;C04B41/50;C04B41/87;C04B41/89;C23C4/10;C23C28/00;C23C30/00;F01D5/28;(IPC1-7):B32B9/04 |
主分类号 |
B32B15/01 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|