METHOD OF SUCKINGLY HOLDING SUBSTRATE, AND SUCKINGLY AND HOLDINGLY CARRYING MACHINE USING THE METHOD

摘要

A suckingly and holdingly carrying machine, wherein a substrate (1) placed on a table (84) is suckingly fixed by a suckingly fixing member (69) suckingly holding the substrate (1) placed on the table, a support member (61) supports the suckingly fixing member, and distance adjusting means (82) capable of individually adjusting a distance between the surface of the table and the suckingly fixing member are installed on the suckingly fixing member (69) at a plurality of positions.