| 摘要 |
This invention is directed to a compact gas mixing apparatus for accurately mixing a plurality of gases. This apparatus comprises a gas panel, pressure control valves (16,18) to regulate differential pressures, flow meters (30,32) and a static mixing chamber (34). The plurality of gases may be a minor gas and a major gas, where, for example, the major gas is nitrogen, and the minor gas is air or oxygen. The major gas and said minor gas is preferably mixed in a proportion of from about 100ppm to about 10,000ppm minor gas in the major gas, more preferably in a proportion of from about 500ppm to about 2,000ppm minor gas in the major gas.
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