COMPLEX MICRODEVICES AND APPPARATUS AND METHODS FOR FABRICATING SUCH DEVICES
摘要
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB <sp>TM</sp>)
申请公布号
WO03050852(A2)
申请公布日期
2003.06.19
申请号
WO2002US39146
申请日期
2002.12.06
申请人
MEMGEN CORPORATION;BANG, CHRISTOPHER, A.;COHEN, ADAM, L.;LOCKARD, MICHAEL, S.;EVANS, JOHN, D.
发明人
BANG, CHRISTOPHER, A.;COHEN, ADAM, L.;LOCKARD, MICHAEL, S.;EVANS, JOHN, D.