| 摘要 |
Disclosed is a temperature adjusting system and an exposure apparatus having the same, which includes a blowing outlet port for supplying a medium into a subject to be temperature controlled, a first temperature detector for measuring a temperature of the medium at the bowing outlet port, a first temperature controller for performing compensation operation in response to an output of the first temperature detector, a second temperature detector for measuring a temperature of a temperature control space which is downstream of the blowing outlet port, a second temperature controller for performing compensation operation in response to an output of the second temperature detector, and a re-heating heater for controlling heat generation on the basis of an output of the first temperature controller so that a medium controlled at constant temperature is supplied into the temperature control space, wherein a temperature set value corresponding to a desired temperature for the space is inputted to the second temperature controller, and wherein an output of the second temperature controller is inputted to the first temperature controller as a temperature set value for the first temperature controller.
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