摘要 |
A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator (300) is formed using at least three kinematic links (312). The kinematic links (312) may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators (340) provided in connection with each of the kinematic links (312). The combination of a parallel kinematic structure and piezoelectric linear actuators (340) provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided. |