| 摘要 |
A differential pressure measuring cell comprising a measuring membrane (7) which can be impinged on both sides by a fluid, said fluid coming into contact with each side of the measuring membrane (7) via a respective measuring connection (2, 17), a respective additional deformable auxiliary membrane (4, 16) being allocated to both sides of the measuring membrane (7) and each side of said auxiliary membrane that faces a measuring connection (2, 17) being in open contact with the measuring membrane (7) and having a sealing surface (23, 24) which can be deformed during the deformation of the auxiliary membrane (4, 16) to lie against the measuring connection (2, 17) in a sealing manner. The measuring membrane (7) and the auxiliary membranes (4, 16) are configured as structured layers of a chip and consist substantially of Si or polysilicon and/or glass.
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