发明名称 |
Methods using dry powder deposition apparatuses |
摘要 |
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
|
申请公布号 |
US2003113474(A1) |
申请公布日期 |
2003.06.19 |
申请号 |
US20020305452 |
申请日期 |
2002.11.27 |
申请人 |
POLINIAK EUGENE SAMUEL;SUN HOI CHEONG STEVE;DESAI NITIN VITHALBHAI;KUMAR NALIN;ROACH WILLIAM RONALD;HAMMER LAWRENCE HARRISON;SOUTHGATE PETER DAVID;SINGH BAWA;RIVENBURG HOWARD CHRISTOPHER;ZANZUCCHI PETER;KELLER DAVID;ROSATI DOMINIC STEPHEN |
发明人 |
POLINIAK EUGENE SAMUEL;SUN HOI CHEONG STEVE;DESAI NITIN VITHALBHAI;KUMAR NALIN;ROACH WILLIAM RONALD;HAMMER LAWRENCE HARRISON;SOUTHGATE PETER DAVID;SINGH BAWA;RIVENBURG HOWARD CHRISTOPHER;ZANZUCCHI PETER;KELLER DAVID;ROSATI DOMINIC STEPHEN |
分类号 |
A61J1/03;A61J3/00;A61K9/70;B05B5/08;B65B1/04;B65B1/30;B65B11/50;(IPC1-7):B05D1/12 |
主分类号 |
A61J1/03 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|