| 摘要 |
PURPOSE: An alignment inspection device of a substrate combining apparatus is provided to inspect pixels in a liquid crystal display panel without loss of time to improve productivity. CONSTITUTION: An alignment inspection device of a substrate combining apparatus includes a substrate module(56) constructed in a manner that two substrates are attached to each other, at least one first measurement instrument(52a,52b,52c,52d) and at least on second measurement instrument(70). The first measurement instrument is set at one side of the substrate module in order to inspect alignment of alignment keys indicated on the two substrates. The second measurement instrument is placed on the substrate module to move to pixels of the substrate module to inspect alignment of the pixels. The first measurement instrument includes four cameras set at the corners of the substrate module, and the second measurement instrument is a microscope attache to one side of the first measurement instrument.
|
