TURBOMOLECULAR VACUUM PUMP WITH ROWS OF ROTOR BLADES AND ROWS OF STATOR BLADES

摘要

The invention relates to a turbomolecular vacuum pump comprising rows of rotor blades (3) and rows of stator blades (4) that alternately engage with one another at varying angles of attack (alpha). The aim of the invention is to improve the properties of such a pump. To this end, at least a part of the blades (1 or 2) of the rows of blades (3 or 4) that are mounted on the pressure side thickens towards the rim facing the pressure side.