METHOD FOR MAKING SUBSTRATES AND RESULTING SUBSTRATES,申请号KR20027017159-传众专利搜索

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发明名称	METHOD FOR MAKING SUBSTRATES AND RESULTING SUBSTRATES
摘要
申请公布号	KR20030047900(A)	申请公布日期	2003.06.18
申请号	KR20027017159	申请日期	2001.06.15
申请人		发明人
分类号	C23C14/14;H01L29/02;H01L21/02;H01L21/762;H01L27/12;H01L31/04	主分类号	C23C14/14
代理机构		代理人
主权项
地址

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